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Ladataan... Semiconductor Manufacturing TechnologyTekijä: Michael Quirk
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In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes. Kirjastojen kuvailuja ei löytynyt. |
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![]() LajityypitMelvil Decimal System (DDC)621.38152Technology Engineering and allied operations Applied physics Electrical, magnetic, optical, communications, computer engineering; electronics, lighting Electronics, communications engineering ElectronicsKongressin kirjaston luokitusArvio (tähdet)Keskiarvo: Ei arvioita.Oletko sinä tämä henkilö? |